In real-time measurement of air-bearing clearance

form error of air-bearing contour is separated from rotating error by using three capacitance micrometers.The transferring mathematical models of random and system error of capacitance micrometer resding are deduced respectively

and angle positions of sensors are optimized using random and system error transferring models as object function.At last

reading measurement error of capacitive micrometer transferred on rotating error are simulated and calculated.Simulation results show that even with the optimal angle

the random error of sensor reading will be amplified

while invariable system deviation is transferred to rotating error measurement result by proportion of one to one.