To solve disadvantages such as contact wear

contact instability

high on-resistance and signal bounce of the traditional micro-mechanical switch based on solid-solid contact

a micro-fluidic inertial switch is developed

which utilizes moving mercury droplet in micro-channel with varying rectangular cross section to close the switch.Anodic bonding and DRIE technology are adopted to fabricate micro-channel and sputtering method is employed to deposit Cr film and quasi static threshold and impact threshold are obtained which are 8.525 gn and 5.09 gn respectively by using centrifugal turntable and acceleration sensor.Experimental result shows that quasi static threshold is greater than impact threshold.