A wireless capacitive pressure sensor based on low temperature co-fired ceramic（LTCC） is presented and design

fabrication

and measurement of the sensor are discussed.Different from traditional LTCC process

C film is introduced as sacrifice layer to fill up built-in cavity of sensor structure and so as to avoid deformation of the embedded cavity during lamination and sintering.The sensor performances good sensitivity in test

compared with precious international research level.Optimization and improvement direction of current structure are proposed.