HE Kun, CUI Hong-juan, HOU Zhan-qiang, et al. Study on modal coupling error analysis and laser trimming method for micromachining vibration gyroscope[J]. 2013, 32(3): 21-24.
HE Kun, CUI Hong-juan, HOU Zhan-qiang, et al. Study on modal coupling error analysis and laser trimming method for micromachining vibration gyroscope[J]. 2013, 32(3): 21-24. DOI: 10.13873/j.1000-97872013.03.033.
Large modal coupling error seriously influences zero-offset stability of gyroscope.The formation mechanism of modal coupling error of a micromachining vibration gyroscope is studied
and the effect rule of structural machining error on modal coupling error is simulated.Simulation result shows that machining error on the support beam is the major factor contributing to the dissymmetry of structural stiffness that results in modal coupling error
and the modal coupling error can be to decreased or even eliminated by removing corresponding material in the symmetrical location.Structural balance experiment is implemented on the microgyroscope by UV laser micromachining technology
when there is no angular velocity inputs after laser trimming
the peak-peak voltage of the modal coupling error signal of microgyroscope is reduced from 2.88V to 0.24V