A new type of electrode of micro gas sensor is designed.This type of coplanar electrode structure eliminates interference of magnetic field from heater on measuring signal.Pt is used as electrode material

SiO2 as thermal insulation layer.Analysis and simulation are carried out by ANSYS.It is found that when the thickness of SiO2 and Si are respectively 50 and 250 μm

widths of the heating and detecting electrode and spacings between the detecting electrodes are respectively 150

15 and 60 μm

higher temperature and uniform temperature distributing in the center are obtained

which is benefit to enhancement of overall performance of the sensor.