A reflective optical fiber displacement sensor is studied
aiming at displacement detection problems encountered in positioning of micromotion worktable.Transmitting and receiving optical fiber probe structure is designed by analyzing the optical fiber coupling principle.High-brightness LED and high-sensitivity silicon photo cell are selected to improve anti-interference ability and to enhance signal intensity.The detecting circuit realizes zero-suppression
and amplification of the signal
thereby improves the resolution and solve the insufficient due to smaller linear range of the sensors.The experimental results show that sensor can achieve sub-micron resolution in the range 0-200 μm.