LI Qi-chang1, WANG Guang-long1, GAO Feng-qi1, et al. Design simulation of micro-cantilever with high sensitive SCR[J]. 2013, 32(1): 95-98+101. DOI: 10.13873/j.1000-97872013.01.034.
Finite element simulation method is used to simulate the effect of different characteristics of the stress concentration regions(SCR)on the measure performance of the micro-cantilever.The accepting or rejecting rule of the sensitivity and bandwidth and range of measurement are analyzed
the variation rule of measurement performance after the introduction of different formal features of SCR is given.It has some guiding significance to design and the optimization of the micro-cantilever-based microsensor and actuator.