The designed gas sensors based on MEMS technology has overcome the disadvantage of previous gas sensors

such as long response time

small quantity of read-out datas and high power consumption.As temperature is one of the important working conditions for gas sensor

the balance of the temperature on sensitive film directly influences the working performance of gas sensor.The designed structure is suspended-membrance stacking-type

and it mainly includes silicon substrate

isolation layer

heating electrode

insulation layer

as well as sensitive film.In order to form a thermal isolation vacuum cavity

and it can effectively reduce the effect of temperature transients on sensitive film.After making use of ANSYS software to build the structure modeling and temperature simulation

it is found that such kind of structure design can reduce the power consumption efficiently

and shorten the respond time

the read-out data quantity also grow much more than before.