It’s essential for measuring thermal property parameters in the micro-meter scale to solve the problem that the thermal gradient is established and the temperature difference is measured accurately.A new device for temperature difference measurement in the micro-meter scale is presented.The temperature difference of severalmicrometer-long silicon nanowires fabricated in the laboratory is measured precisely.when the voltage of heater is 0.1

0.2

0.3

0.4

0.5 V

the temperature difference is 7

23

47

78

109 K

which is able to correlate the simulation results with ANSYS.The Seebeck coefficient of silicon nanowires measured by the device is 4.24 × 10-4 V / K

which is coincident with Seebeck coefficient of silicon.The experimental results show that this structure can provide stable temperature field and precisely measurement temperature difference

and it can meet the basic requirement for temperature difference measurement in micro-meter scale.