Structure analysis and design on thermal expansion driven micro-valve is carried out

using IntelliSuite software

and effect of factors

such as structure of micro-heater

which influences micro-valve is discussed.The model for PDMS micro-valve is made using SU—8 glue moulding process.The whole process of micro-valve preparation is divided into four parts as metal deposit of thin-film micro-heater

preparation of micro-valve elastic thin film and fluid flow passage

and fabrication process of every part and the bonding technique are stated.The property of micro-valve is improved by microprocessing.Pump is used as driving source of fluid

when the driving voltage of micro-valve reach up to 9V

the micro-valve is closed successfully.