SU—8 is used as stuctural material

UV light photolithography process is adopted

especially inclined exposure technology

a micro-flow channel which is a new type

miniaturization

low cost

three-dimensional structure

high aspect ratio is processed and its height is about 1100μm.Exposure dosage

prebaking time

post-baking time and development time needed by fabrication processing of the micro-flow channel are conformed preliminary to offer a reference for processing micro flow channel in a different size.The micro-flow channel based on this method is used in micro-flow cytometers

can provide many parameters such as red blood cells count

hemoglobin concentration

platelet count and red blood cell index

etc.