Aiming at the issues that in the process of a physical measurement procedure

value and frequency of many vibration signals change in a wide range

but one single transducer can hardly satisfy the testing requirement

a kind of four units integrated aligned array MEMS bionic vector vibration sensor is proposed.This aligned array vibration sensor contains four micro-structure sensors

whose testing ranges are 10

100

500

1 000 gn.On the basis of the mathematical model analysis on sensitive structure

the array sensing unit is simulated by ANSYS.The relative test results are carried out.The measurement results show that both the two direction of the aligned array vibration sensor have high sensitivity

good linearity and good output stability.The sensitivity of the x direction is 2.613 4 mV/gn and y is 2.556 3 mV/gn

the linearity of x direction is 0.999 91and y is 0.999 68.