A one-port electrostatic excitation and capacitive detection method for micro-resonator based on frequency separation is presented.This method solves the problem of electrical cross-talk in two-port resonator under same-frequency excitation

meanwhile

the structure is simplified by using only one electrode

which not only makes manufacture convenient

but also maximizes the area for detecting capacitance.Double-frequency excitation is selected according to the results of harmonic analysis of the output current and experimental system is designed. The experimental results show that curve of open-loop character and parameters such as resonance frequency and Q-factor can be obtained using the experimental system

and this is the foundation for realizing closed-loop of the resonator in the future.