A new type of temperature sensor based on MEMS redundant structure is designed to raise the response time and the reliability level of Pt temperature sensor.The γ-Al 2O3 ceramics with thickness of 0.1 mm can be micro-machined.The sensitive films are formed by sputtering and depositting which are controlled by magnetism

and the standard resistance is manufactured by ion beam etching.The analysis and tests show that the relation between the output of sensor and the temperature change is linear.90 % response time is less than 60 s in the air

and the nonlineary is less than 0.01 % in range of the temperature-20 ℃～ 180 ℃.The parallel-connected work mode which is designed by binary redundant units can improve the reliability level of sensors.