In order to solve the problem of the lapping trace can’t be measured on the ball

MEMS gyro is applied

a trace measurement system based on 3-axis MEMS gyro and micro-controller STM32 is proposed.The principle of the ITG3200 and the trace measurement system scheme is introduced.The influence of temperature variation on the zero-offset of silicon micromachined gyro is analyzed.A compensation model is constructed based on least square method

zero-offset stability is significantly enhanced.The dual rotation lapping experiment is carried out.The experimental results show that the lapping uniformity of dual rotation lapping can be evently distributed on the ball.