Aiming at the problem of the stochastic error is large in MEMS sensors

and sometimes

it can cover the useful signals.Allan variance method is proposed to analyze experimental data of MEMS sensors.Varieties of random noises

source and characteristics are analyzed.The advantage of Allan variance analysis method is not only determine the characteristics of stochastic error

but also determine the error coefficients.So it can combine with the correspording various filtering methods to achieve better filtering effect.Experiments prove Allan variance analysis is an effective method to research stochastic errors of MEMS sensor.