Based on the theory of semiconductor gas sensor

a micro thermal plate structural carrier

which is processed utilizing MEMS technology by electrochemical grown Al2O3 membrane is presented

planar thin film process is used to manufacture Pt thin film heating resistor and signal electrode.On the two electrodes of micro thermal plate

painting γ-Fe2O3-SnO2-Pt-Pd to form kerosene streaming sensing unit

to realize the integration of two units for gas test on the micro structure.The sensor works on pulse mode

working period is 30s

when heated

the temperature can achieve 400 ℃

and it forms the test condition of kerosene.The test result shows that kerosene（marker object-quinane）test can realize volume fraction from 0 to 7000×10-6

90 % absorbing response time is shorter than 8s

separating response time is shorted than 12s

the relation of the signal output of sensor and the volume fraction of kerosene is complete logarithmic linear.