LI Peng1, WANG Xiao-qian2, XUE Chen-yang2, et al. A novel high sensitivity and shock resistance integrated optical accelerometer[J]. 2012, 31(3): 99-102+108.
LI Peng1, WANG Xiao-qian2, XUE Chen-yang2, et al. A novel high sensitivity and shock resistance integrated optical accelerometer[J]. 2012, 31(3): 99-102+108. DOI: 10.13873/j.1000-97872012.03.001.
A novel integrated optical accelerometer based on micro-ring resonator is proposed.The accelerometer has higher sensitivity(56.6 mV/gn)and good performance of shock resistance
which up to 105gn of acceleration.The sensing principle is described and analyzed.Model of micro-ring resonator coupling element is established.The waveguide mode transimission curve is drawn by Matlab software and the design parameters of micro-ring resonator and coupling spacing
which between microcavity and waveguide are optimized
by finite difference time domain(FDTD)method.The limit of impact which the cantilever can withstand is given by ANSYS.The simulation result is correspondence with the theoretical analysis result.The accelerometer can supply new idea and theoretical reference for high sensitivity and shock resistance MOEMS sensors.