Micromachine airflow tilt sensor which can be sensitive to tilt angle is described.Adopting micro-machined technique two deep groove are corroded on the silicon plate

and two cantilever beams of metal film heated hot wire is set up at each deep groove.Semicircle airtight space forms sense elements.Through Wheatstone bridge

the tilt output voltage is obtained.Single-chip computer and temperature sensor constitute compensation circuit to achieve temperature compensation and linear compensation.The test shows the sensor’s performance is as follow: measuring range is ±30°

resolution is less than 0.1°

working temperature is better than 50 ms

nonlinear is less than 0.1 %.The sensor is not only in small size but also in simply crafting.It is good in sensitive organ’s output consistency

and suitable for mass production.