The principle

design technology and fabrication of a kind of integrative sensor of small flow

pressure

temperature is introduced.The sensor is made up of sensitive element and modulating circuit is introduced.The signal output ranges 0 ～5V.Various environmental experiments are carried out on transducers

the results show that the flow precision reaches 3 %

the pressure precision reaches 0.2 %

the temperature precision reaches 0.5 %

and the flow thermal zero drift is less than 0.2 %FS/℃

the pressure thermal zero drift is less than 0.1 %FS/℃.This transducer can satisfy the request of user.