Carbon nanotubes are excellent materials of field emission cathode.Based on the carbon nanotubes and copper composite electroplating technology.The layout of the carbon nanotubes of pressure sensors is simulated using FEM

the size of the anode membrane is optimized using simulation annealing algorithm and pressure sensor process are designed and achieved.In the case of no affecting the electroplating quality

diameter of the carbon nanotubes can be as small as possible

and without affecting the vertical for the select length spacing in the maximum current obtained with 500 nm.For the pressure window of the anodic film

the optimal thickness is 0.209 84 mm and optimal size 4.917 8 mm

at this time in the maximum deformation and stress.By the feasibility implementation process

the pressure sensor with small size

light weight

high sensitivity can be produced.