In order to get the propagation characteristics of Love wave in the layered structure consists of ST-quartz and silica

and fabricate the Love wave biosensor with higher sensitivity

theoretical derivation and numerical computations have been achieved.The wave equations have been solved from the dynamic equations of the layered structure.The expressions of displacement field have been derived with the dispersion curve of the Love wave in this structure.Based on the analytical expressions which have been derived

the structures are analyzed and the characteristic curves of Love wave are drawn.The Love wave propagation features in laminar structure are also studied.According to the computing results with the structure

the Love wave sensor is fabricated with MEMS processes and is tested by the electro deposition experiment.The difference between theoretical sensitivity and experimental sensitivity are analyzed.The results indicate that the mass sensitivity of the device is 100 cm2/g and the detection limit is 3.65 ng.The demand for the high sensitive biochemical detection is basically satisfied.