The primary applications for terahertz（THz）technology have so far been high precision spectrum detection technology

superresolution imaging

and high performance communication et al.THz region locates on the border between far-IR and submillimeter which is still rather blurry.The dimension of THz devices is from several ten micrometers to several millimeters which are difficult or hard to fabricate by the traditional machining technology.MEMS technology has many advantages to fabricate these devices.An overview of recent progress in the research and development of MEMS antennas

transmission lines

waveguides structures

and slow wave structures and metamaterial devices based on DRIE

LIGA technologies for terahertz frequencies is presented.The advantages and disadvantages of MEMS technology and applications in THz devices fabrication are analyzed.