CeO<sub>2</sub>掺杂对ZnO薄膜气敏特性的影响

季力; 杨晶; 李健

doi:10.13873/j.1000-97872011.07.006

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CeO₂掺杂对ZnO薄膜气敏特性的影响

研究与探讨 | 更新时间：2025-09-11

- CeO₂掺杂对ZnO薄膜气敏特性的影响
- Effects of CeO₂ doping on gas sensing properties of ZnO thin films
- 传感器与微系统 2011年30卷第7期页码：60-63
- 作者机构：
  
  1. 厦门大学物理与机电工程学院物理系
  2. 内蒙古大学物理科学与技术学院
- 作者简介：
- 基金信息：
  
  内蒙古自治区自然科学基金资助项目（200607010109）;内蒙古自治区高等学校科学研究计划资助项目（NJ05030）
- DOI：10.13873/j.1000-97872011.07.006
  中图分类号： O484.4
- 纸质出版：2011
- 稿件说明：
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[1]季力,杨晶,李健.CeO_2掺杂对ZnO薄膜气敏特性的影响[J].传感器与微系统,2011,30(07):60-63.

JI Li1, YANG Jing2, LI Jian2. Effects of CeO₂ doping on gas sensing properties of ZnO thin films[J]. 2011, 30(7): 60-63.
[1]季力,杨晶,李健.CeO_2掺杂对ZnO薄膜气敏特性的影响[J].传感器与微系统,2011,30(07):60-63. DOI： 10.13873/j.1000-97872011.07.006.

JI Li1, YANG Jing2, LI Jian2. Effects of CeO₂ doping on gas sensing properties of ZnO thin films[J]. 2011, 30(7): 60-63. DOI： 10.13873/j.1000-97872011.07.006.

摘要

ZnO薄膜进行CeO2掺杂

研究掺杂含量和热氧化对薄膜结构、表面、晶粒尺寸及气敏特性的影响。结果显示

用热蒸发制备的高纯Zn膜经500℃热氧化

获得c轴取向ZnO多晶薄膜。掺CeO2可抑制晶粒生长使颗粒细化平均粒径减小

同时改善了ZnO薄膜的体相化学计量比

Zn与O的比例从未掺杂时1∶1.28降到1∶1.191。XPS分析给出薄膜中Zn显+2价

O为-2价。掺CeO2（9%）可大大提高薄膜对乙醇和丙酮的敏感性

灵敏度分别达35和40。

Abstract

The doping effect of CeO2 in thin films structure

topography

grain size and gas sensing properties of ZnO thin films is investigated.The polycrystalline thin films with c-axis orientation can be obtained after thermal vacuum evaporation.The doping behavior can refine the grain size

simultaneously reduce the stoichiometric ratio from Zn∶O=1∶1.28 down to Zn∶O= 1∶1.191.The XPS results show that Zn existed as +2 and O as-2 states.Additionally

CeO2 doping can dramatically enhance the sensitivities to ethanol and acetone

reaching up to 35 and 40

respectively.

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Keywords

references

稀土La掺杂SnO 2 薄膜气敏特性 [J]. 谢俊叶,李健,汪良. 传感器与微系统 . 2010(01)

Al doped ZnO thin films for gas sensor application [J] . I G Dimitrov,A O Dikovska,P A Atanasov,T R Stoyanchov,T Vasilev. Journal of Physics: Conference Series . 2008 (1)

Solid state ceramic gas sensors based on interfacing ionic conductors with semiconducting oxides [J] . Elisabetta Di Bartolomeo,Enrico Traversa,Manuela Baroncini,Vega Kotzeva,R.Vasant Kumar. Journal of the European Ceramic Society . 2000 (16)

Lanthanum doped SnO 2 and ZnO thin films sensitive to ethanol and humidity [J] . I Stambolova,K Konstantinov,S Vassilev,P Peshev,Ts Tsacheva. Materials Chemistry and Physics . 2000 (2)

Preparation of ZnO thin films for high-resolution field emission display by electron beam evaporation [J] . Yoichiro Nakanishi,Aki Miyake,Hiroko Kominami,Toru Aoki,Yoshinori Hatanaka,Goro Shimaoka. Applied Surface Science . 1999 (1)

Development and testing of HCl gas sensor for flue gas monitoring [J] . N.N. Ahmed,G.M. Kale,R.V. Kumar,D.J. Fray. Solid State Ionics . 1996

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CeO2掺杂对ZnO薄膜气敏特性的影响

Effects of CeO2 doping on gas sensing properties of ZnO thin films

DOI：10.13873/j.1000-97872011.07.006

摘要

Abstract

关键词

Keywords

references

CeO₂掺杂对ZnO薄膜气敏特性的影响

Effects of CeO₂ doping on gas sensing properties of ZnO thin films