A vertical comb actuator based on the plastic-deformation process is designed.The movable center micro-mirror is sustained by four groups of serpentine elastic beams.The fabrication of actuator is based on Si-Si bonding technology.The DRIE etching method is used to release the movable combs and fixed combs.The precise self-aligning between the movable combs and fixed ones is implemented with the usage of the stage on the cover wafer fabricated by KOH anisotropic etching.The vertical offset structure is generated between movable combs and fixed ones with the plastic-deformation process and a Z direction electrostatic vertical comb actuator with serpentine elastic beam is fabricated successfully.