A low-cost valveless micropump based on piezoelectric actuation is presented.The optimized value of opening angle is obtained by numerical simulation

which is the reference of design parameters of the diffuser/nozzle element.A 300 μm depth of pump chamber substrate and a 100 μm depth of cover are fabricated on pyrex glass using photographic and wet chemical etching processes.Then

by using plasma cleaning technology

they are bonded to PDMS membrane to accomplish the fabrication of the micropump.The maximum flow rate and backpressure of the pump are about 436 μL/min and 620 Pa when applying a 100V square wave driving voltage at 110 Hz across the piezoelectric-disc.