ZHANG Xiao-li1, CHEN Shui-jin2. Research status and progress of high-temperature resistance pressure sensors[J]. 2011, 30(2): 1-4. DOI: 10.13873/j.1000-97872011.02.027.
耐高温压力传感器研究现状与发展
摘要
现有商业化压力传感器绝大多数工作在常温条件下
工作温度高于200℃者尚不多见
远不能满足高温下的压力测量要求
因此对高温压力传感器的研究成为必然。论述了国内外几类高温压力传感器的研究进展、关键技术及应用情况
并探讨了主要存在的问题和未来的发展趋势。
Abstract
At present
most pressure sensors work at normal temperature
and seldom pressure sensor work at temperature above 200℃.It is far from meeting the need of measurement requirements on special background.So the research of high-temperature resistance pressure sensor is necessary.Several main high-temperature pressure sensor in worldwide is discussed from research progress
key technology and applications.The main problem existing and the future development trend are analyzed.