A droplet actuating chip was designed and fabricated using electrostatic force to manipulate microfluid.The actuation principle and fabrication processes are introduced.Experimental platform for actuating test are demonstrated.With open structure

the chip consists of silicon as substrate

silicon oxide and polysilicon as insulating layer

heavily doped polysilicon as actuating electrode arrays

high quality Si3N4 film as dielectric layer

and fluorocarbon polymer as hydrophobic layer.Experiment shows that the droplet is transported smoothly in a programmable manner in the two-dimensions plane at a minimum voltage of 15V

and the maximum speed reached to 96mm/s.The droplet actuating chip can be used in lab-on-a-chip system due to its simple fabrication process and convenient operation.