Displacement is one of the microgripper’s key features

the conventional methods can not be used for measuring its output displacement because of the small size of the microgripper.According to its characteristics

a displacement test method is proposed for the microgripper

using the non-contact measurement

a vision-based micro-displacement measurement devices is designed and the measurement software package is developed.The test software is compiled by the LabVIEW graphical programming language.The program can be realized image calibration

measurement

and image annotation features.A detailed image calibration method is realized through a desktop micrometer.The displacement of microgripper testing experiments is carried out to verify the availability of measuring devices

and summarizes the changing rules of displacement variation with voltage.The device has a certain generality

can be used for displacement test of other MEMS devices

and its precision is ±1μm.