A thermal conductivity measurement system for composite thin films has been designed based on micro-bridge static measurement technology.The system is composed of PC

the instrument control

data acquisition module

and the vacuum system with temperature controller.Software programming was achieved on LabVIEW platform.The thermal conductivity of a cantilever structure composed of SiO2 film and polysilicon film had been measured by the system in 10-4 Pa vacuum.Measurement results show that

the equivalent thermal conductivity of the cantilever is 9

1

2W/（m·K） at temperature range 320

4

00K.With the increasing of temperature

the thermal conductivity raises and the experimental results are in accordance with the theoretical value.The system has high

test efficiency

good commonality and expansibility.