Adhesion is a peculiar phenomenon of micro/nano-machine.When the strength of the component’s material meets the demand

the adhesion and friction in the micro/nano-machines are the main cause of their failure.To overcome or reduce adhesion has become the hotspot in the micro/nano-electromechanical systems（MEMS/NEMS） research field.The adhesion issue in the micro/nano-machines is introduced.The mechanisms of adhesion and various adhensive models used in adhesive contact are analyzed.The micro/nano-machines’ design principle of anti-adhesion using surface energy method and asperity integral method is illustrated.Various anti-adhesion methods such as release dry processes

real contact area reducing

and surface energy reducing

are presented.