The structure design and principle of semiconductor double axis force transducer is introduced

and software ANSYS is used to operate computer simulation.By analyzing

the paste position of strain gauge and distribution of stress were determined.Various environmental experiments were carried out for three transducers

the results show that the sensitivity of transducer is better than 0.05 V/N

the precision reaches 0.5 %FS

the zero drift is less than 1 %FS/h

and the thermal zero drift is less than 0.5 %FS/℃.This transducer can satisfy the request of user.