Microwave sintering technique was employed to study the gas-sensing property and stability of single doped ZnO sensor arrays after analyzing the principles and characteristics of microwave sintering.The experimental results show that the longer the ZnO and doped ZnO thick films are sintered

the lower the sensor conductivity and sensitivity are.The sensor sintered by microwave for 20 minutes have the highest sensitivity and lowest temperature for optimized sensitivity.Those sensor sintered for 60 minutes have the best stability.Microwave sintering technique can effectively modify and control sensibility and stability of gas sensor.It is worth further promotion.