A three dimensional finite element model for the capacitive proximity sensor is developed.A simulation of different parameters of capacitive sensors has been carried out using FEA.The influence of distance of measured-object

width of electrode and length gap ratio of electrode on sensitivity of sensor and compared with theoretical data.The results show that the sensitivity of the sensor is direct ratio to the width

and the length and gap ratio of electrode

meanwhile

it is inverse ratio to the distance of measured-object.This research has some degree of guiding significance for the structure design of capacitive proximity sensor.