Compared with the previous ones

a new-type seismic geophone based on MEMS acceleration sensors has greatly improved its performance.The structure characteristics and main technical parameters of the new type MEMS seismic geophone for oil exploration is introduced

how the specific size of structure of the new-type seismic geophone is achieved through mechanical property simulation of the structure of micro-sensor.A sample MEMS seismic geophone have been fabricated on the high-resistance silicon wafer through the combination techniques of the surface machining and the bulk machining by using magnetron sputtering

photolithography

chemical etching and plasma etching and so on.