Because of the unique characteristics of both compliant mechanism and bistable mechanism

the compliant bistable mechanism（ CBM） has become one of the hotest fields for researchers all over the world. The latest development on research of MEMS-based compliant bistable mechanism in recent years is reviewed. Various actuation mechanisms have been used in the compliant bistable mechanism

including mechanical latching

magnetic latching

electrothermal latching

multi-field coupled latching compliant bistable mechanism. And the working principle

properties and applications are also compared. Research prospects as well as some problems and challenges

with which maybe confronted in the future

are outlined.