An alumina template formed by electrochemical growth is processed into micro-cantilever structure using MEMS technology.Such structure is used as the substrate of the catalytic combustion type gas sensor.The platinum film resistance is made by plane film process.Furthermore

the sensitive arm and temperature compensation arm are formed by coating Al2O3—ZrO2—ThO2—Pt—Pd and Al2O3—ZrO2—ThO2—PdO for making the gasoline sensor.The result indicated that the sensor can detect the gasoline volume fraction ranging from 0 to 15×10-3（the standard gas is methane） and possess the properties of linear output.Meanwhile

the initial stability and long-term stability of gasoline sensor are also studied.