Light-induced thin-film materials have great potential value in micro-electro-mechanical-system（MEMS） and tests of the basic physical parameters of thin-film material are important foundational work.whereas the present tensile machines in the market are too expensive and cannot meet the measurement needs under micro dimensions

a tensile test system of thin film material is designed which can activate precise and steady load.And a tensile test virtual instrument is programmed by LabVIEW to collect

analyze

process and store those data in tests

and output control signals.This system has the advantage of high resolution of 1 μm and 1mN

thereby satisfying the need of the micro-dimension tests.