Vacuum sealed chamber must be formed to withstand high temperature for high-temperature Absolute pressure sensor.Welding technique of ceramic to realize vacuum sealing and titanium alloy material.Because of the presence of welding stress in welding process

the ceramic is easy to be chipped.By designing the weld dimension

selecting metal material

designing cooling process

designing process parameter which realize high requirement for vacuum sealing.Experiment package after welding is analyzed.The result indicates that the leak rate and weld strength of vacuum sealed chamber can meet the requirement of practical product application.