A structure of TiN double resonant beams pressure sensor is proposed

the pressure is measured through the relation between the resonant frequency of TiN resonant beams and the measured pressure.The maths model of sensitive structures of the resonant sensor is established

through the analysis and numeration from the theory

and simulation by the ANSYS software

the varied extension of the length and the optimization of the beams are educed and the optimal position of the TiN resonant on the rectangle pressure membrane is confirmed.And this is very important to the design of the sensors’ structure.