A novel film gas sensor is proposed based on the plane microelectrode structure

using the numerous small cuboids in turns instead of conventional planar film structure by citing the concept of discrete array.This development makes the film have the ability of 3D sensitive effect.According to the proliferation response theory of semiconductor film

a theoretical analysis is made on the sensitivity and response time of the sensor

which proves that the new sensor has an advantage over the conventional one on the response time and sensitivity.And effect of thickness of gas sensing thin film on gas response time is analyzed.