A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.It works based on bimorph effect.SU—8 and Nickel are adopted as functional materials and structural materials and copper is used as sacrificed layer material.A finite element analysis software ANSYS is adopted to simulate the variation of displacement against time and drive force is determined.A parameter of structure is designed by comparing result.Samples of device are machined through exposal

plating and etching technology.And the samples of device are tested by scanning electron microscope（SEM）.Measurement and analysis are made.