The design and realization of pre-stressed valve are described and it is applied into the micropump.Based on precision machining

the pump is fabricated and assembled.Relevant experiments are carried out to study the reliability of the pre-stressed valve and the transport property of the pump.The results indicate that pre-stressed valves can prevent fluid reverse effectively and the pump has excellent stability and great performance

under the square wave driving voltage of 250V

200Hz

the pump is able to provide flow rates up to 5.5027mL/min

and this kind of pump also can be used in micro-applications.The design of the pre-stressed valve and the structure of the pump are useful to the development of the applied piezoelectric micopump.