According to the description of the dynamic of the electrostatic comb micro-resonators

the system level universal parameter model is built.The model is a micro model consisted of some sub-blocks based on MAST langue.It can verify the ability of the peripheral circuit and decrease computational cost obviously.Appropriate parameter value is chosen based on mode analysis and structure sensitivity analysis so that the work resonant frequency can far from the higher order resonant frequency.Making use of symmetry electrode can restrain the lower order perturbation.It is discovered that the work resonant frequency lessen slightly as the length of the DETF beam increasing

but the opposite with the variation of its width and all parameters of the comb.The height of the DETF beam is unrelated to the work resonant frequency.