Multi-stack anodic bonding using two electrodes is realized.Experimental study is performed based on glass-silicon-glass triple-stack structure.As one of the results the additional glass rarely influences on the first bonding but the first bonded glass influences on the second bonding as there are irregularly current breaks.Sodium clustering induced yellow-brown points appears on the second anodic bonding.Strength testing results show that reversal potential during the second bonding between the first bonding interface makes the strength on the first bonded interface worse

but this bonding method is still fit for MEMS package under optical parameters.