QI Yong-yue, LIN Yu-chi, ZHANG Li, et al. Study on piezoelectric micro-motion stage at nanometer-scale[J]. 2009, 28(6): 53-55+58. DOI: 10.13873/j.1000-97872009.06.025.
纳米级压电微动台的设计研究
摘要
提出了一种新颖的"推—拉"接力运动原理
并将其应用于纳米级步距压电微动台的设计中。该原理变传统的单驱动器结构为双驱动器结构
避免了运动过程中的悬空状态
配以适当的四路驱动信号
使压电微动台能够实现连续、平稳的运动。根据使用要求设计了驱动控制系统
通过C8051F单片机产生四路驱动信号
以保证压电微动台在不同频率和电压下进行工作
并实现了整个系统的闭环控制。
Abstract
A novel principle of push-pull relay movement is proposed and applied in the design of the piezoelectric micro-motion stage.In structure design the traditional single actuator is updated to the double actuators in order to avoid the impending state.With the proper four-channel driving signals
the stage can move continuously and smoothly.The driving and controlling system is designed.The four-channel driving signals with different voltage and frequency are generated by C8051F MCU.In addition the close-loop position is realized.