A full-closed loop control system is designed

which takes a new 6-PSS parallel micro-manipulation platform as object

and it is based on 6-axis micro-displacement sensor which is applied to terminal motion platform.The structure feature and working principle of both the 6-PSS micro-manipulation platform and the 6-axis micro-displacement sensor are described.By comparison of the experiment results in open loop and close loop

the conclusion is obtained that the precision of the system positioning is improved in the full-closed loop which is based on the 6-axis micro-displacement sensor.Thus the precise 6-axis pose control of the micro-manipulation platform can be realized.