CUI Jian-guo1, HOU Wen-sheng1, ZHENG Xiao-lin1, et al. Research on function experiment of electromagnetism driven micropump[J]. 2009, 28(2): 8-9+12. DOI: 10.13873/j.1000-97872009.02.014.
磁能驱动微型泵的性能实验研究
摘要
在电磁场驱动原理的基础上
设计并研制了一种磁能驱动的微型泵。微型泵包括进/出液管、扩散管/喷管、驱动薄膜、腔体、电磁线圈和永磁体。微型泵的整体尺寸约为11 mm×4 mm
腔室半径为5mm
深2mm。利用正交实验方法
对微型泵的性能进行了测试。在电压为4V、驱动薄膜厚度为6μm、频率为5Hz方波脉冲的最佳实验条件下
微型泵的最大泵送流速约为0.21mL/m in。
Abstract
The design
fabrication and characterization of electromagnetism driven micropump based on the principle of electromagnetic field are presented.The micropump includes in/out liquid tube
diffuse/nozzle
membrane
chamber
electromagnetism coil and permanent magnet.The dimension of micropump is about 11 mm×4 mm.The micropump chamber is round with diameter of 5 mm and depth of 2 mm.The function testing of micropump is carried out by using orthogonality experiment method.The maximum flow rate of the micropump is 0.21 mL/min under 4 V
5 Hz square wave power supply and 6 μm of membrane.