Neural micro-sensor

used for achieving neural recording and stimulation at many locations within the nerve tissue to explore the therapy of neurological diseases

is a critical component of the BCI system.A circuit model of neural signal detection in the process of the interaction between the sensor and the nerve tissue is proposed.The mechanic structure of the micro-sensor is designed based on the consideration of physiology

physics and engineering

and the dimensional parameters of the probe shank are determined.The 3D structure

created by assembling two 2D silicon electrodes onto the supporting silicon platform and held parallel by a silicon spacer

can provide truly stable and reliable 3D positioning of site with minimum trauma.The single-channel test result of action potential indicates that this micro-sensor has a good performance of acquiring neural signals.