In concern of the adhesion problem of the MEMS pressure sensor which is used in the electrode force signal measurement of spot welding

different adhesive is presented to glue the MEMS pressure sensor and the sensor is test in the pressure testing platform developed by the authors in the same pressure as spot welding.The testing results show that the output of the MEMS pressure sensor which glued by the α-cyanoacrylate adhesive is better than the output of the sensor glued by the epoxy adhesive and phenol formaldehyde adhesive.The reason of the output difference is that the sickness and the Young’s modulus of the adhesion layers of the adhesives are different.